waterjet
Water Guide Laser Machine

WL90

  • Ultra-precision cutting of thick materials by projecting a laser onto a waterjet
  • revents thermal deformation and damage to parent material due to the cooling effect of water
  • Precision machining of various materials such as metal, SI, SIC, etc.
  • Provides smooth cutting surface without burrs and secondary contamination

Implementation of fusion processing of laser and waterjet

Innovative fusion processing of laser and waterjet using the total reflection characteristics of light

  • Fusing two technologies by coupling a laser into a waterjet
  • Minimized heat affected zone (HAZ) due to water, resulting in minimal deformation
  • Materials thicker than 15mm can also be processed
  • Has excellent processing perpendicularity compared to traditional laser processing
  • Very small slot machining down to 0.06 mm is possible
  • Processable depth (based on 4kW)
    - Si < 12T
    - SiC < 8T
    - Al < 18T
    - Steel < 10T

APPLICATIONS

  • Sample 1 Sample 1

    Ultra High Temperature Ceramics (UHTC)
    Components for semiconductor heater equipment

  • Sample 2 Sample 2

    SiC material
    Cutting and grooving of semiconductor equipment jig parts

  • Sample 3 Sample 3

    SUS304 0.2T material
    Semiconductor equipment components

  • Sample 4 Sample 4

    Al 6063 0.1T material
    Ø0.06 ~ Ø0.3 hole processing test sample

  • Sample 5 Sample 5

    SUS304 3T material
    Semiconductor equipment parts minimum slotting width 0.06mm

  • Sample 6 Sample 6

    Si 4T material
    Semiconductor CSR parts slotting processing sample

Technical data

Travel distances (X*Y*Z) 400 * 300 * 280 (mm)
B-axis rotation angle ±105°
C-axis rotation angle endless
Machine table 3-axis 450 * 350 (mm)
Machine table 5-axis Ø220
3-axis table loading weight 110kg
5-axis table loading weight 70kg
Dimension (W*D*H) 1990 * 2215 * 2470 (mm)
Controller HEIDENHAIN TNC 640 or Siemens 840D
Laser head Wavelength : 1064 - 1080 nm / Nozzle : Ø 0.05 mm
Water pump (water pressure) Max. 500 bar
Travel distances (X*Y*Z) 640 * 400(250) * 400 (mm)
Machine table 3-axis 600 * 540 (mm)
Machine table 5-axis Ø450
3-axis table loading weight 650kg
5-axis table loading weight 120kg
Dimension (W*D*H) 1990 * 2215 * 2470 (mm)
Controller HEIDENHAIN TNC 640 or Siemens 840D
Laser head Wavelength : 1064 - 1080 nm / Nozzle : Ø 0.05 mm
Water pump (water pressure) Max. 500 bar
Travel distances (X*Y*Z) 900 * 900(700) * 540 (mm)
Machine table 3-axis 950 * 920 (mm)
Machine table 5-axis Ø650
3-axis table loading weight 1000kg
5-axis table loading weight 180kg
Dimension (W*D*H) 2525 * 3350 * 3300 (mm)
Controller HEIDENHAIN TNC 640 or Siemens 840D
Laser head Wavelength : 1064 - 1080 nm / Nozzle : Ø 0.05 mm
Water pump (water pressure) Max. 500 bar
Travel distances (X*Y*Z) 1500 * 800 * 400(540) (mm)
Machine table 3-axis 1540 * 850 (mm)
3-axis table loading weight 2000kg
Dimension (W*D*H) 2950 * 3040 * 2950 (mm)
Controller HEIDENHAIN TNC 640 or Siemens 840D
Laser head Wavelength : 1064 - 1080 nm / Nozzle : Ø 0.05 mm
Water pump (water pressure) Max. 500 bar